Vacuum Bearings
Overview
Vacuum bearings are a standard line in our SPACEA Series for special environments.
Further specialized SPACEA bearings are available for corrosive, cleanroom, and high-temperature applications.
Products
FG9 grease-packed stainless steel bearings are suitable for cleanroom environments at atmospheric pressure or in vacuum.
Features
- Low grease scatter and particle emissions
- Corrosion resistant
Applications
- Semiconductor manufacturing equipment
- Organic electro-luminescence (OEL) manufacturing equipment
Hybrid bearings combine ceramic balls with fluororesin self-lubricating cages to achieve excellent resistance to corrosion at both atmospheric pressure and in vacuum.
Features
- Grease-free
Lubrication provided by solid lubricant eliminates the need for grease. - Self-lubricating cage
A fluororesin cage provides continuous lubrication from a solid lubricant.
Applications
- Transport/conveyance equipment in vacuum
- Inspection equipment
DFO bearings feature special lubrication coatings applied to the rings, balls, and cage to deliver superior cleanliness and long-life.
The E-DFO specification uses a low-vapor-pressure hydrocarbon lubricant coating, while V-DFO uses a fluorine oil lubricant coating.
These new-concept bearings are suited for cleanroom environments at atmospheric pressure and in vacuum.
Features
- Low particle emissions
Specialized cleanroom grease keeps generated particles low. - Low outgassing
Applications
- Semiconductor manufacturing equipment
- Organic electro-luminescence (OEL) manufacturing equipment
YS bearings with spacer joints use an alloy-based self-lubricating material (sintered alloy) between the balls to stand up to high-temperature vacuum environments.
Features
- Suited for high-temperature vacuum
YS bearings stand up to vacuum environments with temperatures up to 350°C. - Long life
Solid lubricant spacers lubricate the bearing and extend life.
Applications
- Ion implanters
- Sputtering equipment
SJ bearings have a “peapod” structure, with solid lubricant spacer joints mounted between two balls in a single cage pocket, making them suited for high-temperature environments at atmospheric pressure or in vacuum.
Features
- Suited for high temperatures
SJ bearings withstand temperatures up to 400°C in both atmospheric pressure and vacuum environments. - Long life
Solid lubricant provided by the spacers and a unique cage structure extend bearing life.
Applications
- Transport/conveyance equipment in furnaces
- High-temperature film manufacturing equipment
With ceramic outer/inner rings and balls, all-ceramic bearings have self-lubricating fluororesin cages to achieve excellent resistance to corrosion in nonmagnetic environments at atmospheric pressure and in vacuum.
Features
- Non-magnetic construction
An all-ceramic structure gives these bearings the highest resistance to corrosion. - Long-life
Anti-wear properties contribute to long operating life.
Applications
- Semiconductor manufacturing equipment
- Organic electro-luminescence (OEL) manufacturing equipment
Catalogs
Search our full listing of catalogs for more details.
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