Vacuum Bearings
Overview
Vacuum bearings are a standard line in our SPACEA Series for special environments.
Further specialized SPACEA bearings are available for corrosive, cleanroom, and high-temperature applications.
Product List
FG9 grease-packed stainless steel bearings are suitable for cleanroom environments at atmospheric pressure or in vacuum.
Features
- Low grease scatter and particle emissions
- Corrosion resistant
Applications
- Semiconductor manufacturing equipment
- Organic electro-luminescence (OEL) manufacturing equipment
Hybrid bearings combine ceramic balls with fluororesin self-lubricating cages to achieve excellent resistance to corrosion at both atmospheric pressure and in vacuum.
Features
- Grease-free
Lubrication provided by solid lubricant eliminates the need for grease. - Self-lubricating cage
A fluororesin cage provides continuous lubrication from a solid lubricant.
Applications
- Transport/conveyance equipment in vacuum
- Inspection equipment
DFO bearings feature special lubrication coatings applied to the rings, balls, and cage to deliver superior cleanliness and long-life.
The E-DFO specification uses a low-vapor-pressure hydrocarbon lubricant coating, while V-DFO uses a fluorine oil lubricant coating.
These new-concept bearings are suited for cleanroom environments at atmospheric pressure and in vacuum.
Features
- Low particle emissions
Specialized cleanroom grease keeps generated particles low. - Low outgassing
Applications
- Semiconductor manufacturing equipment
- Organic electro-luminescence (OEL) manufacturing equipment
YS bearings with spacer joints use an alloy-based self-lubricating material (sintered alloy) between the balls to stand up to high-temperature vacuum environments.
Features
- Suited for high-temperature vacuum
YS bearings stand up to vacuum environments with temperatures up to 350°C. - Long life
Solid lubricant spacers lubricate the bearing and extend life.
Applications
- Ion implanters
- Sputtering equipment
SJ bearings have a “peapod” structure, with solid lubricant spacer joints mounted between two balls in a single cage pocket, making them suited for high-temperature environments at atmospheric pressure or in vacuum.
Features
- Suited for high temperatures
SJ bearings withstand temperatures up to 400°C in both atmospheric pressure and vacuum environments. - Long life
Solid lubricant provided by the spacers and a unique cage structure extend bearing life.
Applications
- Transport/conveyance equipment in furnaces
- High-temperature film manufacturing equipment
With ceramic outer/inner rings and balls, all-ceramic bearings have self-lubricating fluororesin cages to achieve excellent resistance to corrosion in nonmagnetic environments at atmospheric pressure and in vacuum.
Features
- Non-magnetic construction
An all-ceramic structure gives these bearings the highest resistance to corrosion. - Long-life
Anti-wear properties contribute to long operating life.
Applications
- Semiconductor manufacturing equipment
- Organic electro-luminescence (OEL) manufacturing equipment
FAQs
Please contact your nearest NSK sales office for details on the variety of bearings for vacuum enviornments on offer in your region.Catalogs
Search our full listing of catalogs for more details.
2D/3D CAD Data
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